LOW-DOSE SI ION-IMPLANTATION INTO SEMI-INSULATING LEC GAAS

被引：10
|
作者：
YAMAZAKI, H
HONDA, T
MIYAZAWA, S
机构：
来源：
ELECTRONICS LETTERS | 1981年 / 17卷 / 21期
关键词：
D O I：
10.1049/el:19810570
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：817 / 819
页数：3
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