NON-GEMINATE RADIATIVE RECOMBINATION IN SPUTTERED AND GLOW-DISCHARGE A-SI-H

被引:11
|
作者
COLLINS, RW
PAUL, W
机构
来源
PHYSICAL REVIEW B | 1982年 / 25卷 / 08期
关键词
D O I
10.1103/PhysRevB.25.5263
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:5263 / 5266
页数:4
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