ADVANTAGES OF DIRECT-FLOW LEAK DETECTION SYSTEMS

被引：0
|
作者：
ABUSH, S
机构：
来源：
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS | 1991年 / 46卷 / 255期
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暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Electronics fabrication is an industry that must pay meticulous attention to quality in the manufacture of sensitive parts. Semi-conductor processing equipment, as a result, must be free of both leaks and contaminants. This month's Solution tells about an application where nondestructive technology provides the precise measurements that the industry requires.
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页码：47 / 53
页数：7
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