ELLIPSOMETRIC STUDIES ON THE INTERACTION OF OXYGEN WITH THIN COPPER-FILMS AT 460-K

被引:7
|
作者
SCHMIDT, R
WISSMANN, P
机构
[1] Univ Erlangen-Nuernberg, Germany
关键词
D O I
10.1002/sia.740120708
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Copper and Alloys
引用
收藏
页码:407 / 411
页数:5
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