OXIDATION BEHAVIOR OF SILICON-NITRIDE UNDER CYCLIC AND STATIC CONDITIONS

被引:11
|
作者
MAEDA, M
NAKAMURA, K
OHKUBO, T
ITO, M
ISHII, E
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D O I
10.1016/0272-8842(89)90044-8
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
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页码:247 / 253
页数:7
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