EXPERIMENTAL AND THEORETICAL INVESTIGATIONS OF DC GLOW-DISCHARGES IN ARGON NITROGEN MIXTURES

被引:30
|
作者
KIMURA, T
AKATSUKA, K
OHE, K
机构
[1] Department of Systems Engineering, Nagoya InslitUte of Technology, Nagoya
关键词
D O I
10.1088/0022-3727/27/8/013
中图分类号
O59 [应用物理学];
学科分类号
摘要
Ar-N2 mixture positive columns of direct current glow discharges are experimentally and theoretically investigated. The electron energy distribution function of the column, which has a great deviation from the Maxwellian, is affected by the amount of N2. The N2 and Ar metastable species densities estimated from the rate equations are inversely proportional to N2 content. There is a large discrepancy between experimental and theoretical electron energy distribution functions, especially for N2 positive columns. The value of pR obtained experimentally is predicted from the measured electron energy distribution function, where p is the gas pressure and R the tube radius.
引用
收藏
页码:1664 / 1671
页数:8
相关论文
共 50 条
  • [41] THEORETICAL AND EXPERIMENTAL STUDIES OF PHOTOTRIGGERED DISCHARGES IN ARGON AND NEON
    BRUNET, H
    LACOUR, B
    SERRA, JR
    LEGENTIL, M
    MIZZI, S
    PASQUIERS, S
    PUECH, V
    [J]. JOURNAL OF APPLIED PHYSICS, 1990, 68 (09) : 4474 - 4480
  • [42] GROWTH-PROCESSES IN A-SI-H DEPOSITION FROM SILANE DC MULTIPOLE GLOW-DISCHARGES
    DEROSNY, G
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (08) : C305 - C305
  • [43] ON THE USE OF ACTINOMETRY TO MEASURE THE DISSOCIATION IN O-2 DC GLOW-DISCHARGES - DETERMINATION OF THE WALL RECOMBINATION PROBABILITY
    PAGNON, D
    AMORIM, J
    NAHORNY, J
    TOUZEAU, M
    VIALLE, M
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1995, 28 (09) : 1856 - 1868
  • [44] ABSOLUTE SPATIALLY-RESOLVED AND TEMPORALLY-RESOLVED OPTICAL-EMISSION MEASUREMENTS OF RF GLOW-DISCHARGES IN ARGON
    DJUROVIC, S
    ROBERTS, JR
    SOBOLEWSKI, MA
    OLTHOFF, JK
    [J]. JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY, 1993, 98 (02) : 159 - 180
  • [45] Apparatus and experimental method for measurements of the potential distributions in dc glow discharges
    Bindemann, T
    Tichy, M
    Behnke, JF
    Deutsch, H
    Becker, K
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (05): : 2037 - 2044
  • [46] Vibrational level population of nitrogen impurities in low-pressure argon glow discharges
    Simon, Peter
    Bogaerts, Annemie
    [J]. JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 2011, 26 (04) : 804 - 810
  • [47] Experimental investigations of glow discharges in hollow cathode geometries at low pressure
    Callegari, T
    Gegot, F
    Pitchford, LC
    Galy, J
    Boeuf, JP
    [J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 2005, 33 (02) : 384 - 385
  • [48] Nitrogen removal from molten steel under argon DC glow plasma
    Sun, MS
    Ding, WZ
    Lu, XG
    [J]. JOURNAL OF IRON AND STEEL RESEARCH INTERNATIONAL, 2005, 12 (04) : 6 - 8
  • [49] ANOMALOUS INTENSE ULTRAVIOLET EMISSION BANDS IN THE RADIOFREQUENCY GLOW-DISCHARGES OF GEH4-FLUOROCARBON-H2 MIXTURES
    YAGI, S
    TAKAHASHI, N
    [J]. APPLIED PHYSICS LETTERS, 1992, 61 (22) : 2677 - 2679
  • [50] Pulse-periodic abnormal glow discharge in nitrogen, argon, hydrogen and their mixtures
    Borisyuk, Yu V.
    Oreshnikova, N. M.
    Mozgrin, D. V.
    Stepanova, T. V.
    Pisarev, A. A.
    [J]. II CONFERENCE ON PLASMA & LASER RESEARCH AND TECHNOLOGIES, 2016, 747