PREPARATION AND PROPERTIES OF (PB,LA)TIO3 PYROELECTRIC THIN-FILMS BY RF-MAGNETRON SPUTTERING

被引：40
|
作者：
NAGAO, N
TAKEUCHI, T
IIJIMA, K
机构：
[1] Environmental Technology Research Laboratory, Matsushita Electric Industrial Co. Ltd, Moriguchi, OSK
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 9B期
关键词：
PLT; THIN FILM; RF-MAGNETRON SPUTTERING; IR SENSOR; PYROELECTRIC COEFFICIENT;
D O I：
10.1143/JJAP.32.4065
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The c-axis-oriented Pb0.85La0.15Ti0.96O3 (PLT) thin films appropriate for the infrared sensor utilized in environmental monitoring were successfully obtained by rf-magnetron sputtering. The effects of sputtering conditions on the thin film growth were studied. Highly c-axis-oriented films were prepared under the most suitable sputtering conditions. Those films showed extremely large pyroelectric coefficient of 1.3 x 10(-7) C/cm2 K and relatively small dielectric constant of 350 (1 kHz) at room temperature. Dielectric and ferroelectric properties of the film were also reported.
引用
收藏
页码：4065 / 4068
页数：4
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