STRUCTURAL TRANSITIONS AND PHASE-COMPOSITION OF THIN-FILMS OF ALUMINUM WITH SILICON

被引：0
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作者：
KAZIMIROV, VP
BATALIN, GI
BUZANEVA, EV
KAGANOV, VY
TRAINIST, TP
SHKAVRO, AG
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来源：
INORGANIC MATERIALS | 1979年 / 15卷 / 02期
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T [工业技术];
学科分类号：
08 ;
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页码：170 / 172
页数：3
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