STRUCTURAL TRANSITIONS AND PHASE-COMPOSITION OF THIN-FILMS OF ALUMINUM WITH SILICON

被引：0

作者：

KAZIMIROV, VP

BATALIN, GI

BUZANEVA, EV

KAGANOV, VY

TRAINIST, TP

SHKAVRO, AG

机构：

来源：

INORGANIC MATERIALS | 1979年 / 15卷 / 02期

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D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：170 / 172

页数：3

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[1] PHASE-COMPOSITION OF THIN-FILMS AS REVEALED BY AUGER DEPTH PROFILING
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[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1989, 114 (01): : 191 - 197
[2] INFLUENCE OF ANNEALING ON THE PHASE-COMPOSITION, TRANSMISSION AND RESISTIVITY OF SNOX THIN-FILMS
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[J]. THIN SOLID FILMS, 1984, 113 (03) : 215 - 224
[3] PHASE-COMPOSITION OF SNOX THIN-FILMS OBTAINED BY REACTIVE DC SPUTTERING
LEJA, E
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KROP, K
TOLL, K
[J]. THIN SOLID FILMS, 1979, 59 (02) : 147 - 155
[4] Study of the Structural Transformation and Phase Composition of Thin Aluminum Films Containing Silicon.
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Batalin, G.I.
Buzaneva, E.V.
Kaganov, V.Ya.
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Shkavro, A.G.
[J]. Izvestiya Akademii Nauk SSSR, Neorganicheskie Materialy, 1979, 15 (02): : 217 - 219
[5] SIMULATION OF STRUCTURAL TRANSITIONS IN THIN-FILMS
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[J]. JOURNAL OF MATERIALS SCIENCE, 1989, 24 (02) : 623 - 626
[6] CRYSTAL-STRUCTURE AND PHASE-COMPOSITION OF THIN ALUMINUM FILMS CONTAINING ADDITIONS OF HOLMIUM
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RUMAK, NV
URBAN, TP
[J]. RUSSIAN METALLURGY, 1984, (05): : 169 - 172
[7] INFLUENCE OF ALLOYING ON TEXTURE, STRUCTURE, PHASE-COMPOSITION AND PROPERTIES OF THIN POLYCRYSTALLINE ALUMINUM FILMS
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[J]. FIZIKA METALLOV I METALLOVEDENIE, 1994, 77 (01): : 83 - 89
[8] EFFECT OF LASER IRRADIATION ON THE PHASE-COMPOSITION OF THIN TRANSITION-METAL-SILICON FILMS
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[9] PHASE-COMPOSITION OF THIN OXIDE-FILMS ON INSB
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[J]. THIN SOLID FILMS, 1981, 76 (01) : 11 - 21
[10] PHASE-COMPOSITION OF THIN TANTALUM FILMS CONTAINING OXYGEN
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[J]. INORGANIC MATERIALS, 1991, 27 (08) : 1492 - 1493

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