LOW-TEMPERATURE CRYSTALLIZATION OF AMORPHOUS SILICON FILMS

被引：4
|
作者：
MAA, JS
LIN, SJ
机构：
来源：
THIN SOLID FILMS | 1979年 / 64卷 / 01期
关键词：
D O I：
10.1016/0040-6090(79)90544-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：63 / 64
页数：2
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