DESIGN CONSIDERATIONS FOR A GAUDI TEST STRUCTURE WHICH CAN BE USED TO DETERMINE THE OPTIMUM FOCUS

被引：1
|
作者：
FALLON, M
WALTON, AJ
STEVENSON, JTM
ROSS, AWS
机构：
[1] Edinburgh Microfabrication Facility, Department of Electrical Engineering, University of Edinburgh, Edinburgh
来源：
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 1994年 / 7卷 / 03期
关键词：
Computer simulation - Electric network parameters - Focusing - Imaging techniques - Optimization - Product design - Sensitivity analysis - Substrates;
D O I：
10.1109/66.311329
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A test structure is described which can be used to optimize the focus of wafer steppers. Simulation is used to examine the effect that some of the design parameters have on the sensitivity of the structure. Finally some practical measurements are presented.
引用
收藏
页码：272 / 278
页数：7
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