OBSERVATIONS ON SPUTTERED EPITAXIAL AU3CD FILMS

被引：1
|
作者：
HUSON, TE [1 ]
WAYMAN, CM [1 ]
机构：
[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801
来源：
MATERIALS RESEARCH BULLETIN | 1978年 / 13卷 / 07期
关键词：
D O I：
10.1016/0025-5408(78)90094-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：723 / 727
页数：5
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