STUDIES OF GLOW-DISCHARGE POLYMERIZATION OF TETRAMETHYLSILANE .2. INFLUENCE OF ARGON, OXYGEN AND TETRAFLUOROMETHANE ON GLOW-DISCHARGE POLYMERIZATION OF TETRAMETHYLSILANE

被引：6
|
作者：
CHEN, KS
INAGAKI, N
KATSUURA, K
机构：
来源：
KOBUNSHI RONBUNSHU | 1981年 / 38卷 / 10期
关键词：
D O I：
10.1295/koron.38.673
中图分类号：
O63 [高分子化学（高聚物）];
学科分类号：
070305 ; 080501 ; 081704 ;
摘要：
引用
收藏
页码：673 / 680
页数：8
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