PROPOSED EXPERIMENT TO MEASURE SURFACE-ROUGHNESS IN SI/SIO2 SYSTEM

被引：4
|
作者：
CHENG, YC [1 ]
机构：
[1] BELL NO RES,OTTAWA,ONTARIO,CANADA
来源：
SURFACE SCIENCE | 1973年 / 40卷 / 02期
关键词：
D O I：
10.1016/0039-6028(73)90084-8
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：433 / 438
页数：6
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