Effect of an Au Nanodot Nucleation Layer on CO Gas Sensing Properties of Nanostructured SnO2 Thin Films

被引:1
|
作者
Le Hung, Nguyen [1 ,2 ]
Kim, Hyojin [1 ]
Kim, Dojin [1 ]
机构
[1] Chungnam Natl Univ, Dept Mat Sci & Engn, Daejeon 305764, South Korea
[2] Thai Nguyen Univ Educ, Dept Phys, Thai Nguyen, Vietnam
来源
KOREAN JOURNAL OF MATERIALS RESEARCH | 2014年 / 24卷 / 03期
基金
新加坡国家研究基金会;
关键词
tin oxide; nanostructured oxide; gas sensor; Au nanodot; sputtering;
D O I
10.3740/MRSK.2014.24.3.152
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We report the effect of the fabric of the surface microstructure on the CO gas sensing properties of SnO2 thin films deposited on self-assembled Au nanodots (SnO2/Au) that were formed on SiO2/Si substrates. We characterized structural and morphological properties, comparing them to those of SnO2 thin films deposited directly onto SiO2/Si substrates. We observed a significant enhancement of CO gas sensing properties in the SnO2/Au gas sensors, specifically exhibiting a high maximum response at 200 C-circle and quite a low detection limit of 1 ppm level in dry air. In particular, the response of the SnO2/Au gas sensor was found to reach the maximum value of 32.5 at 200 C-circle, which is roughly 27 times higher than the response (similar to 1.2) of the SnO2 gas sensor obtained at the same operating temperature of 200 C-circle. Furthermore, the SnO2/Au gas sensors displayed very fast response and recovery behaviors. The observed enhancement in the CO gas sensing properties of the SnO2/Au sensors is mainly ascribed to the formation of a nanostructured morphology in the active SnO2 layer having a high specific surface-reaction area by the insertion of a nanodot form of Au nucleation layer.
引用
收藏
页码:152 / 158
页数:7
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