SURFACE ANALYSIS OF ION-IMPLANTATION BY SECONDARY-EMISSION MASS SPECTROGRAPH

被引：0

作者：

HERNANDEZ, R ^{[1
]}

VIDAL, G ^{[1
]}

LANUSSE, P ^{[1
]}

SLODZIAN, G ^{[1
]}

机构：

[1] OFF NATL ETUD & RECH AEROSP, CHATILLON, FRANCE

来源：

MEMOIRES SCIENTIFIQUES DE LA REVUE DE METALLURGIE | 1973年 / 70卷 / 01期

关键词：

D O I：

暂无

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

引用

页码：47 / 52

页数：6

共 50 条

[1] SECONDARY-ELECTRON EMISSION DURING ION-IMPLANTATION
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