THE EFFECT OF SPATIAL-DISPERSION OF THE DIELECTRIC PERMITTIVITY ON THE CAPACITANCE OF THIN INSULATING FILMS - NON-LINEAR DEPENDENCE OF THE INVERSE CAPACITANCE ON FILM THICKNESS

被引：23
|
作者：
KORNYSHEV, AA [1 ]
VOROTYNTSEV, MA [1 ]
ULSTRUP, J [1 ]
机构：
[1] TECH UNIV DENMARK,CHEM DEPT A,DK-2800 LYNGBY,DENMARK
来源：
THIN SOLID FILMS | 1981年 / 75卷 / 02期
关键词：
D O I：
10.1016/0040-6090(81)90445-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：105 / 118
页数：14
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