NEUTRALIZATION AND INELASTIC-SCATTERING ENERGY-LOSS OF LOW-ENERGY HE+ IONS AT INP(110) SURFACES

The InP(110)-l × 1 surface is investigated with a high-resolution low energy ion scattering system. Attention is paid to the precise measurement of energy spectra of the scattered He+ ions from indium atoms on the surface at incident energies ranging from 300 to 1300 eV. The single scattering peaks are found to be composed of two components (peaks P1 and P2) of which the energies are shifted toward the low side with respect to the binary elastic collision model. The peak P2 is concluded to be due to the ions which are neutralized in the incoming path and subsequently re-ionized in the violent collision. The energy shift of the peak P1 has a continuous character, showing a gradual increase with increasing incident ion energy. Apparent neutralization is observed for the ions incident along the channel direction [10] at the (110) surface, and this is discussed in connection with the continuous energy loss. © 1990.