ON THE PREPARATION OF AMORPHOUS FILMS OF SI-TE-AS-GE

被引：0
|
作者：
REEHAL, HS
THOMAS, CB
机构：
来源：
THIN SOLID FILMS | 1981年 / 76卷 / 03期
关键词：
D O I：
10.1016/0040-6090(81)90692-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：221 / 236
页数：16
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