COMPARISON OF INTERFACE-STATE GENERATION BY 25-KEV ELECTRON-BEAM IRRADIATION IN P-TYPE AND N-TYPE MOS CAPACITORS

被引:91
|
作者
MA, TP [1 ]
SCOGGAN, G [1 ]
LEONE, R [1 ]
机构
[1] IBM CORP,SYST PROD DIV,E FISHKILL,HOPEWELL JUNCTION,NY 12533
关键词
D O I
10.1063/1.88366
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:61 / 63
页数:3
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