DECOMPOSITION OF NH3 ON SI(100) - A SSIMS STUDY

被引：34
|
作者：
ZHOU, XL
FLORES, CR
WHITE, JM
机构：
[1] Department of Chemistry and Biochemistry, University of Texas, Austin
来源：
SURFACE SCIENCE | 1992年 / 268卷 / 1-3期
关键词：
D O I：
10.1016/0039-6028(92)90933-W
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The decomposition of NH3 on Si(100) has been studied using static secondary ion mass spectroscopy (SSIMS). Adsorption of NH3 on Si(100) at 100 K is dissociative and produces NH2(a) and H(a). Although slow thermal decomposition of NH2(a) to N(a) and H(a) occurs even at 320 K, most NH2(a) is stable up to 630 K. It decomposes rapidly between 630 and 730 K with an activation energy of 30 +/- 4 kcal/mol and a pre-exponential factor of 4 x 10(8 +/- 1) s-1. There is no evidence for NH(a). A small fraction of NH2(a) recombines with H(a) at 685 K, liberating NH3(g). H(a) desorbs as H-2 at 800 K and N(a) diffuses into the bulk of Si(100) above 750 K.
引用
收藏
页码：L267 / L273
页数：7
相关论文
共 50 条
  • [21] Mechanistic Investigation of the Catalytic Decomposition of Ammonia (NH3) on an Fe(100) Surface: A DFT Study
    Yeo, Sang Chul
    Han, Sang Soo
    Lee, Hyuck Mo
    JOURNAL OF PHYSICAL CHEMISTRY C, 2014, 118 (10): : 5309 - 5316
  • [22] On the Energetics of nh3 Adsorption and Decomposition on nb(100) Surface : a ubi-qep Study
    Saied Azizian
    Fereydoon Gobal
    Reaction Kinetics and Catalysis Letters, 2002, 76 : 43 - 51
  • [23] Kinetic study on the reaction of NH3 thermal decomposition
    Dirtu, Daniela
    Odochian, Lucia
    REVISTA DE CHIMIE, 2006, 57 (08): : 882 - 885
  • [24] Sticking probability and adsorption process of NH3 on Si(100) surface
    Takaoka, T
    Kusunoki, I
    SURFACE SCIENCE, 1998, 412-13 : 30 - 41
  • [25] THE ADSORPTION AND THERMAL-DECOMPOSITION OF PH3 AND NH3 ON GAAS(100)
    SINGH, NK
    MURRELL, AJ
    HARRISON, D
    FOORD, JS
    JOURNAL OF PHYSICS-CONDENSED MATTER, 1991, 3 : S167 - S172
  • [26] SSIMS IDENTIFICATION OF SURFACE INTERMEDIATES IN THE THERMAL-DECOMPOSITION OF TMGA ON SI(100) - COMMENT
    CADWELL, LA
    MASEL, RI
    SURFACE SCIENCE, 1994, 301 (1-3) : 415 - 422
  • [27] Effect of temperature on NH3 reactivity with Si(100) 2 x 1
    Zaïbi, MA
    Sébenne, CA
    Lacharme, JP
    SURFACE REVIEW AND LETTERS, 2001, 8 (06) : 621 - 626
  • [28] NH3 AND NO INTERACTION WITH SI(100)-(2X1) SURFACES
    RANGELOV, G
    STOBER, J
    EISENHUT, B
    FAUSTER, T
    PHYSICAL REVIEW B, 1991, 44 (04): : 1954 - 1957
  • [29] Nitridation of Si(100)-(2 × 1) surface by NH3: A quantum chemical cluster model study
    Xu, Xin
    Kang, S.-Y.
    Yamabe, T.
    Physical Review Letters, 2002, 88 (07) : 761061 - 761064
  • [30] A SSIMS and TPD study of tert-butylacetylacetate adsorption on Si(100)
    Chang, CC
    Huang, IJ
    Lung, CH
    Hwang, HY
    Teng, LY
    JOURNAL OF PHYSICAL CHEMISTRY B, 2001, 105 (05): : 994 - 1002
12345