INVESTIGATION AND DESIGN OF OPTICAL-PROPERTIES OF POROSITY SUPERLATTICES

被引：91
|
作者：
BERGER, MG [1 ]
THONISSEN, M [1 ]
ARENSFISCHER, R [1 ]
MUNDER, H [1 ]
LUTH, H [1 ]
ARNTZEN, M [1 ]
THEISS, W [1 ]
机构：
[1] RHEIN WESTFAL TH AACHEN, INST PHYS 1, D-52056 AACHEN, GERMANY
来源：
THIN SOLID FILMS | 1995年 / 255卷 / 1-2期
关键词：
LUMINESCENCE; MULTILAYERS; OPTICAL PROPERTIES; SILICON;
D O I：
10.1016/0040-6090(94)05617-M
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We have investigated the optical properties of porosity superlattices and complex multilayer systems. Type II superlattices reveal a more complex layer structure than expected from the substrate doping levels. Type I layer systems have been used to form highly reflective layer systems and Fabry-Perot filters.
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页码：313 / 316
页数：4
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