REGULAR AND ASYMMETRIC NEGATIVE-ION MAGNETRON SOURCES WITH GROOVED CATHODES

被引:16
|
作者
ALESSI, JG
SLUYTERS, T
机构
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 1980年 / 51卷 / 12期
关键词
D O I
10.1063/1.1136152
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:1630 / 1633
页数:4
相关论文
共 50 条
  • [1] A RING MAGNETRON IONIZER FOR POLARIZED NEGATIVE-ION SOURCES
    ALESSI, JG
    SLUYTERS, T
    HERSHCOVITCH, A
    AIP CONFERENCE PROCEEDINGS, 1984, (117) : 32 - 36
  • [2] REVIEW OF NEGATIVE-ION SOURCES
    MIDDLETON, R
    REVUE DE PHYSIQUE APPLIQUEE, 1977, 12 (10): : 1435 - 1444
  • [3] NEGATIVE-ION PLASMA SOURCES
    SHEEHAN, DP
    RYNN, N
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1988, 59 (08): : 1369 - 1375
  • [4] A MAGNETRON NEGATIVE-ION SOURCE WITH PLASMA INJECTION
    HERSHCOVITCH, AI
    PRELEC, K
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1980, 25 (08): : 971 - 971
  • [5] SURFACE NEGATIVE-ION PRODUCTION IN ION SOURCES
    BELCHENKO, Y
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (06): : 1385 - 1393
  • [6] NEGATIVE-ION SOURCES FOR ION-IMPLANTATION
    HOLMES, AJT
    PROUDFOOT, G
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 55 (1-4): : 323 - 327
  • [7] EMITTANCE MEASUREMENTS ON NEGATIVE-ION SOURCES
    DOUCAS, G
    GREENWAY, TJL
    HYDER, HRM
    KNOX, AB
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1976, 23 (02) : 1155 - 1161
  • [8] INTENSE UNPOLARIZED NEGATIVE-ION SOURCES
    SLUYTERS, T
    AIP CONFERENCE PROCEEDINGS, 1982, (80) : 145 - 149
  • [9] Modeling multicusp negative-ion sources
    Pagano, Damiano
    Gorse, Claudine
    Capitelli, Mario
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2007, 35 (05) : 1247 - 1259
  • [10] REVIEW OF SPUTTER NEGATIVE-ION SOURCES
    MIDDLETON, R
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1976, 23 (02) : 1098 - 1103