THE STRUCTURE OF ION-IMPLANTED CERAMICS

The structure of ion implanted ceramics may be crystalline with large concentrations of point defects, point defect clusters, and dislocations, or it may be amorphous. The details of the implanted microstructure depend upon the implantation parameters including ion species, fluence, and substrate temperature. For a given set of implantation parameters, the as-implanted microstructure depends upon the type of chemical bonding present in the ceramic. A second level of structure is the distribution of the implanted ions between substitutional and interstitial lattice sites and among various residual charge states. The amorphous state may contain different short-range order for different implanted ion species. Recent results for these various effects are reviewed. © 1990.