EXCIMER-LASER-MODIFIED MOLECULAR-BEAM EPITAXY AND METAL ORGANIC MOLECULAR-BEAM EPITAXY OF (AL)GAAS ON (CA,SR)F2/GA AS AND GAAS SUBSTRATES

被引：0
|
作者：
TU, CW
DONNELLY, VM
BEGGY, JC
BAIOCCHI, FA
MCCRARY, VR
HARRIS, TD
LAMONT, MG
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 02期
关键词：
D O I：
10.1116/1.584409
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：607 / 607
页数：1
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