ION MIXING OF AL2O3 AND AL FILMS ON SIO2

被引：7
|
作者：
GALUSKA, AA [1 ]
UHT, JC [1 ]
ADAMS, PM [1 ]
COGGI, JM [1 ]
机构：
[1] AEROSPACE CORP,MAT SCI LAB,EL SEGUNDO,CA 90245
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 02期
关键词：
D O I：
10.1116/1.574978
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：185 / 192
页数：8
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