共 50 条
- [2] CHARACTERIZATION OF SILICON DIOXIDE AND PHOSPHOSILICATE GLASS DEPOSITED FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06): : 2081 - 2089
- [3] An investigation of the effect of ion implantation on defectiveness of silicon dioxide films passivated by phosphosilicate glass [J]. Metallovedenie i Termicheskaya Obrabotka Metallov, 1998, (09): : 5 - 8
- [4] OXIDATION OF SILICON-NITRIDE FILMS COVERED WITH PHOSPHOSILICATE GLASS [J]. DOKLADI NA BOLGARSKATA AKADEMIYA NA NAUKITE, 1984, 37 (08): : 1031 - 1033
- [7] PLANARIZING OF PHOSPHOSILICATE GLASS-FILMS ON PATTERNED SILICON-WAFERS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (02): : 487 - 489
- [10] REFRACTIVE-INDEX DISPERSION OF PHOSPHOSILICATE GLASS, THERMAL OXIDE, AND SILICON-NITRIDE FILMS ON SILICON [J]. APPLIED OPTICS, 1988, 27 (19): : 4104 - 4109