ATOM-PROBE ANALYSIS OF A NANOCRYSTALLINE FE-C-TA SPUTTERED SOFT MAGNETIC THIN-FILM

被引：13
|
作者：
HONO, K
HASEGAWA, N
BABU, SS
FUJIMORI, H
SAKURAI, T
机构：
[1] Institute for Materials Research, Tohoku University, Sendai
来源：
APPLIED SURFACE SCIENCE | 1993年 / 67卷 / 1-4期
关键词：
D O I：
10.1016/0169-4332(93)90343-A
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Sputtered Fe-10.3at%C-8.3at%Ta magnetic thin films annealed below 650-degrees-C were analyzed by the atom probe method in order to elucidate the mechanism of formation of the nanocrystalline structure. In the as-deposited amorphous film, evidence for significant variation of the carbon concentration was found. By annealing below the crystallization temperature, the degree of fluctuation of the carbon concentration appeared to be enhanced. After heat treatment for optimum soft magnetic properties, TaC was observed. In this condition, substantial amounts of supersaturated C and Ta were still dissolved in the alpha-Fe phase.
引用
收藏
页码：391 / 397
页数：7
相关论文
共 35 条
  • [1] ATOM-PROBE ANALYSIS OF SPUTTERED CO-CR MAGNETIC THIN-FILMS
    HONO, K
    MAEDA, Y
    LI, JL
    SAKURAI, T
    APPLIED SURFACE SCIENCE, 1993, 67 (1-4) : 386 - 390
  • [2] ATOM-PROBE COMPOSITIONAL ANALYSIS OF CO-CR SPUTTERED MAGNETIC THIN-FILMS
    HONO, K
    BABU, SS
    MAEDA, Y
    HASEGAWA, N
    SAKURAI, T
    APPLIED PHYSICS LETTERS, 1993, 62 (20) : 2504 - 2506
  • [3] 3-DIMENSIONAL ATOM-PROBE ANALYSIS OF A SPUTTER-DEPOSITED CO-CR THIN-FILM
    HONO, K
    YEH, K
    MAEDA, Y
    SAKURAI, T
    APPLIED PHYSICS LETTERS, 1995, 66 (13) : 1686 - 1688
  • [4] Partitioning Behavior of Al and Si in FINEMET Nanocrystalline Soft Magnetic Alloys, as Studied by Atom-Probe Tomography
    Knipling, K. E.
    Daniil, M.
    Willard, M. A.
    MICROSCOPY AND MICROANALYSIS, 2009, 15 : 266 - 267
  • [5] SOME ASPECTS OF ATOM-PROBE ANALYSIS OF FE-C AND FE-N SYSTEMS
    SHA, W
    CHANG, L
    SMITH, GDW
    LIU, C
    MITTEMEIJER, EJ
    SURFACE SCIENCE, 1992, 266 (1-3) : 416 - 423
  • [6] Reactive interdiffusion of Cu/Co/Au thin-film couples investigated by 3-dimensional atom-probe
    Lang, C
    Schmitz, G
    Kirchheim, R
    DIFFUSIONS IN MATERIALS: DIMAT2000, PTS 1 & 2, 2001, 194-1 : 1525 - 1531
  • [7] Crystallite distribution analysis based on hydrogen content in thin-film nanocrystalline silicon solar cells by atom probe tomography
    Shimizu, Yasuo
    Sai, Hitoshi
    Matsui, Takuya
    Taki, Kenji
    Hashiguchi, Taiki
    Katayama, Hirotaka
    Matsumoto, Mitsuhiro
    Terakawa, Akira
    Inoue, Koji
    Nagai, Yasuyoshi
    APPLIED PHYSICS EXPRESS, 2021, 14 (01)
  • [8] Influence of quantum confinement on magnetic properties of Fe/Mo/Fe and Fe/Ta/Fe thin-film systems
    E. E. Shalygina
    A. A. Rozhnovskaya
    A. N. Shalygin
    Technical Physics Letters, 2011, 37 : 980 - 983
  • [9] Influence of Quantum Confinement on Magnetic Properties of Fe/Mo/Fe and Fe/Ta/Fe Thin-Film Systems
    Shalygina, E. E.
    Rozhnovskaya, A. A.
    Shalygin, A. N.
    TECHNICAL PHYSICS LETTERS, 2011, 37 (10) : 980 - 983
  • [10] MAGNETIC FORCE MICROSCOPY ANALYSIS OF SOFT THIN-FILM ELEMENTS
    RAVE, W
    BELLIARD, L
    LABRUNE, M
    THIAVILLE, A
    MILTAT, J
    IEEE TRANSACTIONS ON MAGNETICS, 1994, 30 (06) : 4473 - 4478
1234