Call for Papers for Special Issue on Production-Level Artificial Intelligence Applications in Semiconductor Manufacturing

被引：0

作者：

Fowler, John ^{[1
]}

Kempf, Karl ^{[2
]}

Moench, Lars ^{[3
]}

机构：

[1] Arizona State Univ, Tempe, AZ 85281 USA

[2] Intel Corp Co, Santa Clara, CA USA

[3] Univ Hagen, Hagen, Germany

来源：

IEEE ELECTRON DEVICE LETTERS | 2023年 / 44卷 / 02期

关键词：

D O I：

10.1109/LED.2023.3235636

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：353 / 353

页数：1

共 50 条

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