LONG-RANGE ENHANCEMENT OF BORON DIFFUSIVITY INDUCED BY A HIGH-SURFACE-CONCENTRATION PHOSPHORUS DIFFUSION

被引：16
|
作者：
LECROSNIER, D
GAUNEAU, M
PAUGAM, J
PELOUS, G
RICHOU, F
机构：
来源：
APPLIED PHYSICS LETTERS | 1979年 / 34卷 / 03期
关键词：
D O I：
10.1063/1.90738
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：224 / 226
页数：3
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