INVESTIGATION OF MICRODEFECTS IN HIGH-PURITY SILICON CRYSTALS BY MEANS OF LITHIUM DECORATION

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作者
KOCK, AJRD [1 ]
BOONEN, PGT [1 ]
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[1] PHILIPS RES LABS,EINDHOVEN,NETHERLANDS
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O59 [应用物理学];
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页码:2816 / 2828
页数:13
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