SOME THERMODYNAMIC ASPECTS OF CVD FILAMENT-PROCESS FOR DIAMOND GROWTH

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作者
VAKIL, HB [1 ]
BANHOLZER, WF [1 ]
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[1] GE,CORP RES & DEV,SCHENECTADY,NY 12301
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O6 [化学];
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0703 ;
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页码:57 / FUEL
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