ION SOURCE FOR LOW-ENERGY NEGATIVE IONS

被引：4

作者：

MUSCHLITZ, EE

RANDOLPH, HD

RATTI, JN

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1962年 / 33卷 / 04期

关键词：

D O I：

10.1063/1.1717876

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：445 / &

共 50 条

[1] LOW-ENERGY ION IMPLANTER FOR NEGATIVE AND POSITIVE-IONS
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