ELECTRON-ENERGY DISTRIBUTION-FUNCTIONS IN RF MOLECULAR PLASMAS - THE ROLE OF 2ND KIND COLLISIONS

被引：0

作者：

CAPITELLI, M

DILONARDO, M

WINKLER, R

WILHELM, J

机构：

[1] UNIV BARI,DEPARTIMENTO CHIM,I-70126 BARI,ITALY

[2] AKAD WISSENSCH DDR,ZENT INST ELEKTR PHYS,INST STEIL GREIFSWALD,DDR-2200 GREIFSWALD,GER DEM REP

来源：

CONTRIBUTIONS TO PLASMA PHYSICS | 1986年 / 26卷 / 06期

关键词：

D O I：

暂无

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

引用

页码：443 / 451

页数：9

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