INFLUENCE OF BROMINE ON THERMAL-OXIDATION OF SILICON SUBSTRATES

被引：1
|
作者：
SUSA, M
SHINOHARA, H
NAGATA, K
GOTO, KS
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来源：
JOURNAL OF THE JAPAN INSTITUTE OF METALS | 1989年 / 53卷 / 10期
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D O I：
10.2320/jinstmet1952.53.10_1054
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页码：1054 / 1061
页数：8
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