MICROSENSORS FOR HEAT-TRANSFER AND FLUID-FLOW MEASUREMENTS

被引：8
|
作者：
UDELL, KS
PISANO, AP
HOWE, RT
MULLER, RS
WHITE, RM
机构：
[1] Department of Electrical Engineering and Computer Sciences Berkeley Sensor, Actuator Center University of California, Berkeley, CA
来源：
EXPERIMENTAL THERMAL AND FLUID SCIENCE | 1990年 / 3卷 / 01期
关键词：
fabrication techniques; fluid flow measurement; heat transfer measurement; microsensors;
D O I：
10.1016/0894-1777(90)90100-L
中图分类号：
O414.1 [热力学];
学科分类号：
摘要：
Ongoing research on the fabrication, performance, and application of microsensors is described from the viewpoint of their use for heat transfer and fluid flow measurements. Fabrication techniques that provide micromachining capabilities for various microscale elements are discussed. The thermal and fluid microenvironment characteristic of these sensors is addressed in detail. Performance characteristics of prototype pressure sensors, humidity sensors, microviscometers, thermistors, thermocouples, and flowmeters are presented. The operation of several integrated microsensors is discussed. Potential applications are mentioned, both as low-cost substitutes for existing transducers and as specialty devices for high spatial resolution and fast response needs. Finally, the use of these ultrasmall-scale transducers for fundamental research related to miscroscale heat and mass transfer is explored. © 1990.
引用
收藏
页码：52 / 59
页数：8
相关论文
共 50 条
12345