ERRORS IN THE MEASUREMENT OF FILM THICKNESS BY MULTIPLE-BEAM INTERFEROMETRY

被引：4

|

作者：

WEAVER, C

BENJAMIN, P

机构：

来源：

NATURE | 1958年 / 182卷 / 4643期

关键词：

D O I：

10.1038/1821149b0

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

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页码：1149 / 1150

页数：2

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