EFFECT OF SWIRL AND CONFINEMENT ON THE FLOW AND TEMPERATURE-FIELDS IN AN INDUCTIVELY COUPLED RF PLASMA

被引：32
|
作者：
BOULOS, MI [1 ]
GAGNE, R [1 ]
BARNES, RM [1 ]
机构：
[1] UNIV MASSACHUSETTS,DEPT CHEM,AMHERST,MA 01003
来源：
CANADIAN JOURNAL OF CHEMICAL ENGINEERING | 1980年 / 58卷 / 03期
关键词：
D O I：
10.1002/cjce.5450580313
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
引用
收藏
页码：367 / 375
页数：9
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