THE NUCLEATION KINETICS OF PLATELIKE OXIDE PRECIPITATES IN CZ-SILICON

被引：1
|
作者：
JABLONSKI, J
WOJCIECHOWSKI, J
KUCHARSKI, K
机构：
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1988年 / 105卷 / 01期
关键词：
D O I：
10.1002/pssa.2211050110
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：113 / 121
页数：9
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