REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION STUDIES OF INSE AND GASE LAYERED COMPOUNDS GROWN BY MOLECULAR-BEAM EPITAXY

被引:26
|
作者
EMERY, JY [1 ]
BRAHIMOSTMANE, L [1 ]
HIRLIMANN, C [1 ]
CHEVY, A [1 ]
机构
[1] UNIV PARIS 06,CNRS,PHYS MIL CONDENSES LAB,UA 782,F-75252 PARIS 05,FRANCE
关键词
D O I
10.1063/1.350972
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have investigated the molecular beam homoepitaxial and heteroepitaxial growth of InSe and GaSe III-VI compounds semiconductors. In situ reflection high-electron energy diffraction measurements reveal that two-dimensional epitaxial growth occurs on (00.1) oriented substrates, at substrate temperatures ranging from 300 to 350-degrees-C. A scanning electron microscopy study of the films surfaces has been performed to correlate their morphology to the growth conditions.
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页码:3256 / 3259
页数:4
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