TEMPERATURE EFFECT OF ION-BEAM MIXING AT AU-SI [111] INTERFACES

被引：0
|
作者：
LI, YP
WANG, PX
CHEN, J
LIU, JR
ZHANG, QH
QIU, CQ
机构：
[1] BEIJING UNIV,DEPT TECH PHYS,BEIJING,PEOPLES R CHINA
[2] CHINESE ACAD SCI,INST PHYS,BEIJING,PEOPLES R CHINA
来源：
VACUUM | 1990年 / 40卷 / 03期
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：281 / 284
页数：4
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