PHASE STRUCTURE IN THIN TANTALUM FILMS

被引：0
|
作者：
PALATNIK, LS
OBOLYANI.OA
NABOKA, MN
GLADKIKH, NT
KHOTKEVI.VI
机构：
来源：
RUSSIAN METALLURGY | 1972年 / 06期
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D O I：
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中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
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页码：128 / 131
页数：4
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