CATHODE ETCHING RATE IN ABNORMAL GLOW-DISCHARGES

被引：5

作者：

CZEKAJ, D ^{[1
]}

HOLLMANN, EK ^{[1
]}

KOZIREV, AB ^{[1
]}

VOLPIAS, VA ^{[1
]}

ZAYTSEV, AG ^{[1
]}

机构：

[1] VI LENIN ELECT ENGN INST,LENINGRAD 197022,USSR

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1989年 / 48卷 / 06期

关键词：

D O I：

10.1007/BF00617859

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：573 / 574

页数：2

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