ATOMICALLY REGULATED LAYER-BY-LAYER GROWTH OF SRTIO3 ON A-AXIS ORIENTED YBA2CU3O7-DELTA THIN-FILMS

被引:4
|
作者
KOINUMA, H [1 ]
FUJITO, K [1 ]
TSUCHIYA, R [1 ]
KAWASAKI, M [1 ]
机构
[1] PRESTO RES DEV CORP JAPAN,KYOTO,JAPAN
来源
PHYSICA C | 1994年 / 235卷
关键词
D O I
10.1016/0921-4534(94)91590-3
中图分类号
O59 [应用物理学];
学科分类号
摘要
The intensity oscillation of reflection high energy electron diffraction (RHEED) was observed during the pulsed laser deposition of ultra-thin SrTiO3 films on a-axis oriented YBa2Cu3O7-delta (YBCO) thin films. This enabled us to control digitally the overlayer thickness on an atomic scale. In the same deposition chamber, we could fabricate high quality epitaxial YBCO thin films on SrTiO3 with Tc exceeding 80K and 90K for a-and c-axis oriented films, respectively. Reducing the particle density below 10(5)cm(-2) on the bottom YBCO films should be promising to construct Josephson tunnel junctions.
引用
收藏
页码:731 / 732
页数:2
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