INSITU FTIR INVESTIGATIONS OF POLYMER SURFACE MODIFICATION IN DOWNSTREAM MICROWAVE PLASMA-ETCHING

被引：0
|
作者：
LEU, JP
JENSEN, KF
机构：
来源：
ELECTRONIC PACKAGING MATERIALS SCIENCE IV | 1989年 / 154卷
关键词：
D O I：
10.1557/PROC-154-253
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：253 / 258
页数：6
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