HIGH-RATE SPUTTERING TECHNIQUES

被引：62
|
作者：
THORNTON, JA
机构：
来源：
THIN SOLID FILMS | 1981年 / 80卷 / 1-3期
关键词：
Compendex;
D O I：
10.1016/0040-6090(81)90201-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
PROTECTIVE COATINGS
引用
收藏
页码：1 / 11
页数：11
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