IMPURITY HETEROGENEITIES IN THE SURFACE-LAYER OF SILICON WITH AN ATOMICALLY CLEAN SURFACE

被引：1
|
作者：
ALEKSANDROV, LN
LOVYAGIN, RN
机构：
来源：
KRISTALL UND TECHNIK-CRYSTAL RESEARCH AND TECHNOLOGY | 1978年 / 13卷 / 12期
关键词：
D O I：
10.1002/crat.19780131216
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
引用
收藏
页码：1471 / 1477
页数：7
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