COMPUTER-SIMULATION OF ION-BEAM MIXING OF COBALT ON SILICON

被引：0
|
作者：
CHAKAROV, IR
KARPUZOV, DS
机构：
来源：
EPM 87: ENERGY PULSE AND PARTICLE BEAM MODIFICATION OF MATERIALS | 1988年 / 8卷
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：357 / 359
页数：3
相关论文
共 50 条
  • [1] COMPUTER-SIMULATION OF ION-BEAM MIXING
    HAN, SH
    KULCINSKI, GL
    CONRAD, JR
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 45 (1-4): : 701 - 706
  • [2] COMPUTER-SIMULATION OF AN ION-BEAM ANTENNA
    PRIDMOREBROWN, DC
    MEYER, RX
    [J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 1976, 4 (02) : 112 - 117
  • [3] COMPUTER-SIMULATION OF ION-BEAM ENHANCED DEPOSITION OF SILICON-NITRIDE FILMS
    ZHOU, JK
    CHEN, YS
    LIU, XH
    ZOU, SC
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 39 (1-4): : 182 - 184
  • [4] COMPUTER-SIMULATION OF ION-BEAM PENETRATION IN AMORPHOUS TARGET
    MIYAGAWA, Y
    MIYAGAWA, S
    [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (12) : 7124 - 7131
  • [5] COMPUTER-SIMULATION OF ION-BEAM METHODS IN ANALYSIS OF THIN-FILMS
    VIZKELETHY, G
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 89 (1-4): : 122 - 130
  • [6] COMPUTER-SIMULATION OF ION-BEAM EXTRACTION FROM A FREE PLASMA SURFACE
    ASAI, K
    YASAKA, Y
    MORI, M
    INOUE, N
    UCHIDA, T
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1976, 15 (07) : 1343 - 1347
  • [7] COMPUTER-SIMULATION OF ION-BEAM EXTRACTION BY FINITE-ELEMENT METHOD
    MORI, M
    NAKAMURA, T
    INOUE, N
    UCHIDA, T
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 (07) : 1377 - 1382
  • [8] ION-BEAM MIXING IN SILICON SYSTEMS
    PAINE, BM
    [J]. PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1985, 530 : 114 - 121
  • [9] FORMATION OF COBALT SILICIDE BY ION-BEAM MIXING
    YE, M
    BURTE, EP
    RYSSEL, H
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 : 528 - 531
  • [10] SIMULATION OF DYNAMIC ION-BEAM MIXING
    SEIDL, A
    TAKAI, M
    [J]. JOURNAL OF APPLIED PHYSICS, 1994, 75 (09) : 4470 - 4474
12345