EXCIMER LASER WITH NARROW LINEWIDTH AND LARGE INTERNAL BEAM DIVERGENCE

被引：0
|
作者：
MUCKENHEIM, W
RUCKLE, B
机构：
来源：
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1987年 / 20卷 / 11期
关键词：
D O I：
10.1088/0022-3735/20/11/019
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：1394 / 1396
页数：3
相关论文
共 50 条
  • [1] ULTRA-NARROW LINEWIDTH EXCIMER LASER SOURCES
    HAWKINS, RT
    EGGER, H
    BOKOR, J
    RHODES, CK
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1979, 69 (10) : 1449 - 1449
  • [2] Narrow-linewidth ArF excimer laser with high efficiency
    Fan, Yuanyuan
    Song, Xingliang
    Zhao, Jiangshan
    Zhou, Yi
    [J]. 2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2017,
  • [3] Excimer laser beam homogenizer with low divergence
    K. Jasper
    S. Scheede
    B. Burghardt
    R. Senczuk
    P. Berger
    H.-J. Kahlert
    H. Hügel
    [J]. Applied Physics A, 1999, 69 : S315 - S318
  • [4] Excimer laser beam homogenizer with low divergence
    Jasper, K
    Scheede, S
    Burghardt, B
    Senczuk, R
    Berger, P
    Kahlert, HJ
    Hügel, H
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 69 (Suppl 1): : S315 - S318
  • [5] NARROW-LINEWIDTH TUNABLE ARFSTAR EXCIMER-LASER SOURCE
    WHITE, JC
    BOKOR, J
    FREEMAN, RR
    [J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1981, 17 (12) : 80 - 80
  • [6] Beam divergence studies on a long pulse XeCl excimer laser
    Hofstra, RM
    vanGoor, FA
    Witteman, WJ
    [J]. HIGH-POWER LASERS: GAS AND SOLID STATE LASERS, 1996, 1788 : 116 - 126
  • [7] NARROW-LINEWIDTH EXCIMER-LASER FOR INSCRIBING BRAGG GRATINGS IN OPTICAL FIBERS
    OTHONOS, A
    LEE, X
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (05): : 3112 - 3115
  • [8] Tunable, high beam quality and narrow linewidth semiconductor disk laser
    Zhang, Peng
    Song, Yanrong
    Zhang, Xinping
    Tian, Jinrong
    Jagadish, C.
    Tan, Hark Hoe
    Zhang, Zhigang
    [J]. OPTICAL ENGINEERING, 2010, 49 (10)
  • [9] Narrow linewidth operation of a spectral beam combined diode laser bar
    Zhu, Zhanda
    Jiang, Menghua
    Cheng, Siqi
    Hui, Yongling
    Lei, Hong
    Li, Qiang
    [J]. APPLIED OPTICS, 2016, 55 (12) : 3294 - 3296
  • [10] Effects of prism beam expander and slits on excimer laser linewidth narrowing module
    张海波
    袁志军
    周军
    魏运荣
    楼祺洪
    [J]. Chinese Optics Letters, 2013, 11 (04) : 41 - 44
12345