CHARACTERIZATION OF SILICON LAYERS VIA GUIDED WAVE OPTICS

被引：15
|
作者：
OLIVIER, M
PEUZIN, JC
机构：
来源：
APPLIED PHYSICS LETTERS | 1978年 / 32卷 / 06期
关键词：
D O I：
10.1063/1.90063
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：386 / 388
页数：3
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